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1. Measure the coordinates of the markers in absolute coordinates. The alignment microscope and the EBL have the same coordinate system. Note the orientation of your chip with respect to the x-y coordinates (You cannot rotate the drawings in cjob!).

This is a rough sketch of the small piece sample stage

2. Load the wafer to the casette, put it to the Airlock (Antti prefers to call it LoadLock). Always put the top first, then the bottom, unload first the bottom and then the top! Same message: never touch the top wafer holder as long as a bottom wafer holder is in! Why: you cover the calibration chip on the bottam wafer holder with the top wafer holder and accidentially destroy this calibration chip!

3. open a terminal window change environment (ce) to your account

4. Go to the Cebpg program and start your job.