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Director: Pertti Hakonen
Secretary:

Fax: +358 9 470 22969

Mail address:
PO BOX 15100
00076 AALTO
FINLAND

Visiting address:
Puumiehenkuja 2B
Otaniemi, Espoo

How to find us

Vastuualue: T31100
VAT number: FI22283574

Start

• You see 2 slots under "Cassette", one of them has to contain your wafer. The program automatically recognizes what wafer holder is in the caesette. Ahm, no, you have to choose the right one, strange...

• Load your wafer holder to the chamber

• In a terminal window type mcur: the stage moves to the position of the faraday cup and measures the current.

• Put SEM on (in CSEM window). You shall see the black hole of the faraday cup. Adjust pmhv if necesary to get a good contrast

• Now SEM OFF and move to your PreMarker:

mpos x,y (mpos 62340.0,12345.0 give the absolute position in mikrometer)

• Click with mouse on the right of Your Wafer, the "#" symbol. A window like this opens:

the parameters given are the absolute x and y coordinates of your PreMarker