Writing Patterns VISTEC EBL
0. Fill PESO
1. Convert Your drawing to the gpf format
2. Load your wafer for direct writing or alignment and writing 2.5 You need [suitable_markers] for alignment.
3. Acquire your .gpf -file using gFTP
4. Prepare exposure with Cjob
5. Start exposure with Cebpg
6. Fill PESO