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Director: Pertti Hakonen
Secretary:

Fax: +358 9 470 22969

Mail address:
PO BOX 15100
00076 AALTO
FINLAND

Visiting address:
Puumiehenkuja 2B
Otaniemi, Espoo

How to find us

Vastuualue: T31100
VAT number: FI22283574

Suitable markers » manually

manually

Manual alignment procedure

see page 92 of manual: "Marker search in joy mode"

• first try automatic alignment, if this fails

• define an appropriate marker with the name joy (case sensitive, typically same parameters as p20)

• use this joy type marker in your cjob

• afa, mvm (move marker, the system aligns the position with respect to the writing lens) then go to CSem and look at the marker. You see that the SEM image is shifted with respect to the writing lens.

This is an image of a gold marker from the calibration chip on the wafer holder. Clearly the contranst is good and automatic alignment works well. Note that the SEM view is shifted with respect to the alignment of the writing lens

Choose a suitable magnification to see the marker well and big enough. Draw a box or some lines with the tools on the left of the window to mark the position of the marker.

• mcur (brings you to the faraday cup)

• pg mov pos /r a,b where a and b are the positions of your marker relatively to the faraday cup, measured with the optical calibration microscope

• look at the marker with the same magnification. Can you see it? If yes continue. Look a bit around (zoom out). If its stays invisible, get a better marker.

• Move your marker to the right position by moving the stage and get the x and y coordinates of your pre marker from the CSem.

• Start your job with the parameter (x and y) for the last step (CSem)

• The machine moves now to the expected marker position and asks you if it is correct. You see with CSem that the marker in this example lies clearly outside of the frame, but close enough (it is close if the pre-alignment with the optical calibration microscope was done properly). You can now quit the job(if no marker is visible) or move the image of your marker with CSem (red mark in figure below) to the correct position of your marker and accept the new position: typing return (Enter) uses this moved position as your marker position and the machine will not do an automatic marker alignment.

This is an image of a copper marker under 1500nm of PMMA/MMA and an layer of 40 nm AlOx. Clearly the contranst is weak, but still visible by human eye. 100000 years of evolution optimizing the procedure of spotting the prey in an natural environment still beats artificial intelligence. Vistec, try harder!