Suitable markers
You find here a list of markers that were used sucsessfully in the past.
Note: Automatic alignment becomes increasingly difficult with decreasing beam current. A (non standerd) marker might be recognised well with 30 nA but not at all with 0.1 nA.
| Name | Material | size in μm | Thicknes in nm | Wafer | Resist | Remark |
|---|---|---|---|---|---|---|
| p20 | goldpalladium | 20 x 20 | 75 plus 2 Ti | Si Siox 300nm | 500nm PMMA/MMA | works well |
| p20 | goldpalladium | 20 x 20 | 75 plus 2 Ti | Si Siox 300nm | 1000nm PMMA/MMA | works well |
| p20 | gold | 20 x 20 | 80 plus 2 Ti | Si Siox 300nm | 500nm PMMA/MMA | standard marker |
| joy | copper | 20 x 20 | 80 | Si Siox 300nm | 1500nm PMMA/MMA+AlOx40nm | does only work manually, too low contrast with 1nA current |
| jp10 | gold | 10x10 | 50 | Si | 300nm MMA/PMMA | Works well |
| p20 | goldpalladium | 20 x 20 | 2 Ti, 25 AuPd, 2 Ti | Si Siox 300nm | 1000 nm PMMA MMA, plus 50nm AlOx | works, but the contrast is just sufficient |
| p20,n20 | niobium | 20x20 | 200 | SiO2/Si | 500nm AR6200 | Good |
| p20,n20 | niobium | 20x20 | 200 | SiO2/Si | 1um PMMA/MAA | Good |
| p20 | palladium | 20x20 | 60 | SiO2/Si | 1um PMMA/MAA | Automatic good with 1.1 nA beam (at least) |
| p20 | gold | 20x20 | 25 | SiO2/Si | 1um PMMA/MAA | Automatic good with 1.1 nA beam |
| p20 | gold | 20x20 | 20 | SiOx/Si | 500 nm PMMA/MMA | good |
| Joy | Aluminum | 20x20 | 100 | SiO2/Si | 700nm PMMA/MAA | bad constract even with 180nA current |
| Example | Example | Example | Example | Example | Example | Example |