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Director: Pertti Hakonen
Secretary:

Fax: +358 9 470 22969

Mail address:
PO BOX 15100
00076 AALTO
FINLAND

Visiting address:
Puumiehenkuja 2B
Otaniemi, Espoo

How to find us

Vastuualue: T31100
VAT number: FI22283574

Recipe for writing patterns by Matthias » Measure the current.

Measure the current.

How to measure the current:

At the SEM:

-tools -> goto panel -> Specimen Current Monitor

-check the checkbox "spot"

-move the spot on top of your resist or in the Faraday cup

-check the checkbox "on"

At the EBL:

-click measure in the Current box.

-The measured value appears after ~ 5 sec. (green number)

Hints: -The current is very constant over many weeks, expect 300 +/-50 pA for the 30µm aperture.

-It might be better to measure the current with aperture 30 and calculate values for smaller apertures like 7.5 and 10 as small currents are not measured accurately enough. I(7.5) = I(30)/30²x7.5²