MILA-5000

1 General Information
2 Tutorial

General Information

Device: MILA-5000 Infrared Lamp Heating System
Contact Person: Pasi Häkkinen
Location: Clean Room
Status: working
Available gases: Ar, 3 % H₂ in Ar
Manuals: pdf manual; tutorial below

Tutorial

This is a short step-by-step tutorial for the MILA oven. Everyone intending to operate the oven should also read the Model MILA-5000 Infrared Lamp Heating System instruction manual.

Sample holder is made of quartz. If the quartz glass is heated with water or oil on it, it will become devitrified when heated (become milky white in appearance and lose its IR transparency! If it becomes stained with water or oil, clean it with alcohol. Always wear gloves when operating the device.

Starting up

Fully open the two main valves of the water circulation system and direct the flow to the oven by opening the two smaller valves, reading MILA IN and MILA OUT (also check that the valves for Edwards Evaporator are closed if it's not being used)
Power up the oven from System Main power switch
Power up flow measurement devices. They take ~30 min to warm up
Gas line 1 is meant for inert gases and line 2 for hydrogen. More info about the mass flow meters you can find from internal pages.
Open gas bottle's main valve
Set the inlet pressure. With 2 bar you can approximately get the maximum flow of argon which the device for inert gases can measure. Decreasing the pressure gives more resolution to needle valve.

Venting the chamber

Chamber should be under vacuum. Do not over-pressurize the chamber!
Open thumb screws sealing the chamber. There is no relief valve at the system.
Open V7. It is fully opened when handle loosens.
Open V3 and V1 at the pressure regulator. Start opening the needle valve V2.
Observe manometer measuring the chamber pressure to make sure that there is no pressure buildup to the chamber. Door will pop open after a while.
Close V1

Loading sample

Clean bottom of your sample from grease. For example wet a clean room wipe with acetone and rub your sample against it.
When placing your chip on the sample holder it should not in any case touch thermocouples head. It has been proven that this might just melt your sample and burn a hole through the thermocouple.
Seal the chamber with two thumb screws. Finger tighten them lightly!
Go to (A), (B) or (C) below

(A) Annealing in atmospheric pressure

Open V8
Open V1. Water in gas washing bottle should start bubbling.
Set the desired flow by adjusting V2

(B) Annealing in vacuum with gas flow

Close V3 and adjust V2 to minimum. Open V9.
Start rough pump
Power up vacuum gauge
Open V1 and V3. Adjust V2 to desired flow/pressure.

(C) Annealing in vacuum

Close V3 and V7. Adjust V2 to minimum.
Open V9.
Power up vacuum gauge.
Start rough pump. Power up turbo's controller. Start pumping with turbo when chamber pressure has dropped to appropriate reading.

Setting up CX-Thermo

CX-Thermo should be always on. Everyone should use the same file MILA5000 for operating the oven to avoid time consuming task of uploading all parameters. For more information about CX-Thermo please refer to the MILA-5000 Control Software CX-THERMO instruction manual.

Set Communications → Settings... → Serial Port to COM3(OMRON...
Press Work Online
Choose Program → Programmer Editor → Start
At “Basic” →”CH1” set “Program No.” you want to use. Use “PV start (slope priority)”.
To check the heating profile, select program you chose “Program” to be used at the top of the window. You can use something allready made or define a new one on a empty slot.
Choose first segments set point such that it differs from previus by 1 °C. You can see the previus value on controller units screen.
Choose wanted PID values and Alarm settings
Close Programmer Editor
From tab Communications choose Transfer to device → Download Changed Parameters
To make sure that loading was succesfull check that the set point value and/or program number on ovens display has changed

Annealing

Make sure all valves at cooling water loop are fully opened. Power up water pump. Flow-sw interlock light on ovens front panel should get lit.
Start TrendViewer program.
Choose 01:E5AR-T43B-FLK from device list and find Set point and Process value from Parameter list. Add Monitor Parameter and press Ok
Set approppriate scale for temperature from Settings → Trend Settings... and click Operation(M) → Start Monitor
Bug on the program cuts execute button out of the window. Click on Run CH1 and press tab.
After adequate time of flushing/pumping press enter to start heating

Finishing

Wait until the oven has cooled down to below 100 °C
Click Stop Monitor(E) and close the TrendViewer program, but leave CX-Thermo running
Power down water pump
If using the turbo pump, stop it, let it slow down, and power down the controller
Open thumb screws sealing the chamber
Close V9 (or V8 if working in atmospheric pressure)
If working in vacuum without gas flow, open V7, V1 and V3, and adjust V2
Pick up your sample
Close gas bottle's main valve and wait that the regulator's high pressure side gets empty
Close all valves leading to oven from gas panel and seal the chamber. Set V2 also to minimum.
Open V9 and pump for a while with rough pump
Close vacuum line and power down the pump
Power down the pressure gauge (if it was on)
Choose Work offline from CX-Thermo
Power down the oven and the flow measurement devices
Close all water cooling valves

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