- Contact Person: Antti Laitinen, Erno Damskägg
- Location: cleanroom
- Status: working
- Paper Manuals: cleanroom
- Run file (rf6) and Design CAD file (dc2) for marker array pattern. Read the above User guide for automatic focusing during the patterning.
- Run file (rf6) and Design CAD file (dc2) for example on how to use the NPGS Fracture-mode in writing bigger areas. By Matthias Brandt.
- The SEM can be booked through a Cryohall booking system