Clean Room:Evaporator
Contents |
General Information
- Contact Person: Mikael Kervinen, Mohammad Haque
- Location: Clean Room
- Status: Working
- Maintenance: -
- Available Crucibles: Chromium, Titanium, Aluminium, Gold
- Typical base pressure: < 2 * 10 − 10 mbar
- Typical operation pressure: < 5 * 10 − 8 mbar
- Disallowed materials: organics, magnetic materials, high vapour pressure metals
- Options: Sample oxidation, ion-beam milling
Notices
-
Cups
| Cup | Material |
|---|---|
| 1 | Cr |
| 2 | Ti |
| 3 | Al |
| 4 | Al |
| 5 | Au |
Manual
This manual is not a replacement for training. Only trained users are allowed to use the evaporator. You must seek training from the current responsible user(s).
Tips
Here is a list of tips and tricks when using the evaporator;
- Ramp the emission current slowly, you can use lower currents and will get a better evaporation that ends sooner
- When the turbo is spooling down you can use the needle valve to let a small (maximum 1 * 10 − 1 mbar) amount of nitrogen into the load-lock in order to decrease the time it takes. Do this slowly as the turbo may be damaged if you add too much gas too quickly
- Make sure your sample is the right way up in the sample holder
- If you wish to get the lowest absolute pressure in the load-lock (e.g. for oxidation) then pump and bake the chamber overnight. If you do this ensure your sample is in the main chamber as the high temperature of the load-lock will destroy any sample with resist on.
